MEMS/NEMS
Using Nanomechanics to Enhance Device Sensitivity
Kimberly L. Turner and Wenhua Zhang
University of California at Santa Barbara,
Santa Barbara, CA
Study on Sensitivity and Resolution of Resistive
Probe by 3-D Device Simulation
J. Kim, *S. Hong, *H. Ko, *D.-K. Min, *H. Park,
*C. Park, *J. Jung, J.D. Lee, B.-G. Park, Hyungcheol Shin
Seoul National University
*Samsung Advanced Institute of Technology
Resistive Probe Storage: R/W mechanism
Seungbum Hong,1 H. Ko,1
D.-K. Min,1 J. Jung,1 H. Park,1 C.
Park,1 S. Buehlmann,1 Y.-W. Nam,1 Y.
Kim,2 K. No,2 J. Kim,3 H. Shin,3
S.-H. Kim,4 H. Shin5, N. Park1
1 Samsung Advanced Institute of
Technology, Korea
2 Korea Advanced Institute of
Science and Technology, Korea
3 Seoul National University, Korea
4 INOSTEK, Korea
5 Kookmin University, Seoul, Korea
Hydrophobicity, Adhesion, and Friction Properties
of Polymers with Nanopatterned Roughness for MEMS/NEMS
Zachary Burton
and Bharat Bhushan
Ohio State
University
Structure and Properties of Fluorinated Organic
Thin Films: Implications for MEMS Devices
David Barriet, H. Justin Moore, T. Randall Lee
University of Houston, Houston, TX
